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Metrology of Site Qualification modules made by Scandinavian Cluster
Last update 27/09/02
Summary of measured parameters in final metrology, parameters outside tolerance in red.
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Inplane parameters
|
Tolerances
|
20220380200001
|
20220380200002
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20220380200003
|
20220380200004
|
|
mhx [um]
|
30,00
|
6,86
|
1,28
|
11,99
|
7,95
|
|
mhy [um]
|
30,00
|
-20,06
|
-23,32
|
-19,27
|
-20,15
|
|
msx [um]
|
100,00
|
3,29
|
9,29
|
40,27
|
28,01
|
|
msy [um]
|
30,00
|
-8,16
|
-4,53
|
-4,49
|
-5,88
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|
sepf [um]
|
10,00
|
0,86
|
-4,96
|
2,33
|
-2,25
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|
sepb [um]
|
10,00
|
1,51
|
3,33
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-3,63
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-2,21
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|
midxf [um]
|
10,00
|
7,25
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3,81
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-1,22
|
3,65
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|
midyf [um]
|
5,00
|
1,87
|
3,50
|
4,96
|
4,83
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|
a1 [mrad]
|
0,13
|
-0,02
|
0,02
|
0,00
|
0,03
|
|
a2 [mrad]
|
0,13
|
-0,06
|
0,02
|
0,03
|
0,04
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a3 [mrad]
|
0,13
|
0,06
|
0,00
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0,00
|
0,05
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|
a4 [mrad]
|
0,13
|
0,07
|
-0,05
|
-0,03
|
0,06
|
|
stereo [mrad]
|
0,13
|
-0,07
|
-0,01
|
-0,09
|
-0,05
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|
hymxf [um]
|
100,00
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-102,58
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-177,44
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-37,43
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-27,07
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hymyf [um]
|
100,00
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65,32
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-115,31
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31,86
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-33,46
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hymaf [mrad]
|
3,14
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-1,73
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-1,45
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-0,35
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-1,41
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hymxb [um]
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100,00
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-60,03
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-49,64
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1,19
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25,30
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hymyb [um]
|
100,00
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-10,38
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49,02
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22,43
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15,95
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hymab [mrad]
|
3,14
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0,26
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2,17
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1,35
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-0,45
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conp1x [um]
|
320,13
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-222,88
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-278,12
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-61,46
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-125,12
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conp1y [um]
|
100,00
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59,17
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-120,47
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30,61
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-38,49
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Outplane parameters
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Tolerances
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20220380200001
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20220380200002
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20220380200003
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20220380200004
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maxZlower [mm]
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-0,2000
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-0,0468
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-0,1036
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-0,2509
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-0,0840
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maxZupper [mm]
|
0,2000
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0,0405
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0,1295
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0,0481
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0,0587
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moduleThickness [mm]
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0,1000
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0,1319
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0,1084
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0,0956
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0,0930
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optimalMaxZerrorLower [mm]
|
0,0500
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0,0259
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0,0305
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0,0287
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0,0318
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optimalMaxZerrorUpper [mm]
|
0,0500
|
0,0271
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0,0256
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0,0300
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0,0315
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optimalRMSZerrorLower [mm]
|
0,0250
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0,0096
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0,0090
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0,0122
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0,0122
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optimalRMSZerrorUpper [mm]
|
0,0250
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0,0098
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0,0082
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0,0094
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0,0113
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loCoolingFacing a [mrad]
|
0,5000
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0,1717
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-0,0855
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0,1309
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0,1625
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b [mrad]
|
3,0000
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3,2103
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0,7245
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0,5545
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1,0439
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loCoolingFacingConcavity [mm]
|
0,0300
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0,0117
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-0,0029
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0,0064
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0,0081
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capMaxThickness [mm]
|
0,6600
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-0,1335
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0,0618
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0,0506
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0,0865
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hyb1LeftNearH [mm]
|
0,1900
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-0,1104
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-0,0201
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0,0164
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-0,1008
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hyb1RightNearH [mm]
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0,1900
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-0,0706
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-0,1022
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0,0221
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-0,0900
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hyb1LeftFarH [mm]
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0,1900
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-0,0934
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0,0164
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-0,0894
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-0,0998
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hyb1RightFarH [mm]
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0,1900
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-0,0840
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-0,0979
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0,0637
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0,0934
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hyb2LeftNearH [mm]
|
0,1900
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-0,1190
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-0,1035
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-0,0479
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-0,0514
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hyb2RightNearH [mm]
|
0,1900
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-0,0959
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-0,1501
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-0,0897
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-0,0855
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hyb2LeftFarH [mm]
|
0,1900
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-0,1190
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-0,1114
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-0,0319
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0,0034
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hyb2RightFarH [mm]
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0,1900
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-0,1221
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0,1564
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-0,0908
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-0,1369
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hyb1Concavity [mm]
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0,1500
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-0,0110
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0,0149
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-0,0137
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0,0236
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hyb2Concavity [mm]
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0,1500
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-0,0153
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-0,0407
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-0,0268
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-0,0439
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hyb1Gap [mm]
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0,2000
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-0,1006
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-0,0360
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-0,0105
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-0,0257
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hyb2Gap [mm]
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0,2000
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-0,1293
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-0,0928
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-0,0919
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-0,1114
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hyb1CapMaxH [mm]
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0,3000
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-0,1317
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0,0232
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0,0899
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0,1074
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hyb2CapMaxH [mm]
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0,3000
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-0,0248
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0,0716
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-0,0206
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0,0092
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hybridMaxThickness [mm]
|
0,4400
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-0,1484
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0,0983
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0,0152
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0,0286
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Data per module
Location of sensors:
- 1 - Upper side, under hybrid
- 2 - Upper side, no hybrid
- 3 - Lower side, under hybrid
- 4 - Lower side, no hybrid
Summary of metrology measurements for the five SQ modules
Initial
metrology (note that the location of the hole and the slot for the
initial metrology is made with less accuracy than final metrology)
Module# 20220380200001
Baseboard# 20220480100002
Sensor location and leakage current before assembly at 150V, 350V,500V and temperature:
|
Position
|
Sensor ID
|
I@150V
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I@350V
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I@500V
|
Temperature
|
|
1
|
STN11036-02097
|
0,19
|
0,29
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0,34
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26,4
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2
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...90
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0,24
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0,34
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0,39
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27,1
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|
3
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...94
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0,23
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0,34
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0,39
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27,2
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|
4
|
...84
|
0,21
|
0,28
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0,29
|
25,8
|
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Sum of currents/ mean temperature
|
|
0,87
|
1,25
|
1,41
|
26,63
|
Initial Metrology:
|
Parameter
|
Design
|
Measure
|
Deviation
|
Tolerance
|
PASS
|
|
mhx [um]
|
-6500,000
|
-6483,300
|
-16,700
|
30,000
|
1
|
|
mhy [um]
|
-37000,000
|
-37014,900
|
14,900
|
30,000
|
1
|
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msx [um]
|
38500,000
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38488,500
|
11,500
|
100,000
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1
|
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msy [um]
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-37000,000
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-37000,900
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0,900
|
30,000
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1
|
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midxf [um]
|
0,000
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4,000
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-4,000
|
10,000
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1
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midyf [um]
|
0,000
|
2,200
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-2,200
|
5,000
|
1
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sepf [um]
|
64090,000
|
64092,500
|
-2,500
|
10,000
|
1
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|
sepb [um]
|
64090,000
|
64092,600
|
-2,600
|
10,000
|
1
|
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a1 [mrad]
|
0,000
|
-0,026
|
0,026
|
0,130
|
1
|
|
a2 [mrad]
|
0,000
|
-0,104
|
0,104
|
0,130
|
1
|
|
a3 [mrad]
|
0,000
|
0,050
|
-0,050
|
0,130
|
1
|
|
a4 [mrad]
|
0,000
|
0,051
|
-0,051
|
0,130
|
1
|
|
stereo [mrad]
|
-20,000
|
-20,018
|
0,018
|
0,130
|
1
|
Final Metrology:
Excel sheet for xy-measurement
Excel sheet for z-measurement
Module# 20220380200002
Baseboard# 20220480100017
Sensor location and leakage current before assembly at 150V, 350V,500V and temperature:
|
Position
|
Sensor ID
|
I@150V
|
I@350V
|
I@500V
|
Temperature
|
|
1
|
STN11033-02105
|
0,21
|
0,3
|
0,35
|
26,7
|
|
2
|
...34
|
0,31
|
0,43
|
0,42
|
25
|
|
3
|
...08
|
0,22
|
0,34
|
0,37
|
26,9
|
|
4
|
...06
|
0,16
|
0,27
|
0,28
|
25,5
|
|
Sum of currents/ mean temperature
|
|
0,9
|
1,34
|
1,42
|
26,03
|
Initial Metrology:
|
Parameter
|
Design
|
Measure
|
Deviation
|
Tolerance
|
PASS
|
|
mhx [um]
|
-6500,000
|
-6500,800
|
0,800
|
30,000
|
1
|
|
mhy [um]
|
-37000,000
|
-37020,800
|
20,800
|
30,000
|
1
|
|
msx [um]
|
38500,000
|
38509,800
|
-9,800
|
100,000
|
1
|
|
msy [um]
|
-37000,000
|
-36999,500
|
-0,500
|
30,000
|
1
|
|
midxf [um]
|
0,000
|
3,200
|
-3,200
|
10,000
|
1
|
|
midyf [um]
|
0,000
|
2,100
|
-2,100
|
5,000
|
1
|
|
sepf [um]
|
64090,000
|
64084,500
|
5,500
|
10,000
|
1
|
|
sepb [um]
|
64090,000
|
64093,600
|
-3,600
|
10,000
|
1
|
|
a1 [mrad]
|
0,000
|
0,007
|
-0,007
|
0,130
|
1
|
|
a2 [mrad]
|
0,000
|
-0,003
|
0,003
|
0,130
|
1
|
|
a3 [mrad]
|
0,000
|
-0,011
|
0,011
|
0,130
|
1
|
|
a4 [mrad]
|
0,000
|
-0,054
|
0,054
|
0,130
|
1
|
|
stereo [mrad]
|
-20,000
|
-20,015
|
0,015
|
0,130
|
1
|
Final Metrology:
Excel sheet for xy-measurement
Excel sheet for z-measurement
Module# 20220380200003
Baseboard# 20220480100018
Sensor location and leakage current before assembly at 150V, 350V,500V and temperature:
|
Position
|
Sensor ID
|
I@150V
|
I@350V
|
I@500V
|
Temperature
|
|
1
|
STN11173-02308
|
0,36
|
0,56
|
0,56
|
25,4
|
|
2
|
...09
|
0,38
|
0,44
|
0,44
|
25
|
|
3
|
STN11033-02137
|
0,27
|
0,41
|
0,41
|
25
|
|
4
|
...36
|
0,28
|
0,44
|
0,46
|
25,5
|
|
Sum of currents/ mean temperature
|
|
1,29
|
1,85
|
1,87
|
25,23
|
Initial Metrology:
|
Parameter
|
Design
|
Measure
|
Deviation
|
Tolerance
|
PASS
|
|
mhx [um]
|
-6500,000
|
-6489,600
|
-10,400
|
30,000
|
1
|
|
mhy [um]
|
-37000,000
|
-37006,000
|
6,000
|
30,000
|
1
|
|
msx [um]
|
38500,000
|
38536,700
|
-36,700
|
100,000
|
1
|
|
msy [um]
|
-37000,000
|
-36995,100
|
-4,900
|
30,000
|
1
|
|
midxf [um]
|
0,000
|
-3,200
|
3,200
|
10,000
|
1
|
|
midyf [um]
|
0,000
|
4,200
|
-4,200
|
5,000
|
1
|
|
sepf [um]
|
64090,000
|
64089,100
|
0,900
|
10,000
|
1
|
|
sepb [um]
|
64090,000
|
64084,500
|
5,500
|
10,000
|
1
|
|
a1 [mrad]
|
0,000
|
-0,004
|
0,004
|
0,130
|
1
|
|
a2 [mrad]
|
0,000
|
-0,024
|
0,024
|
0,130
|
1
|
|
a3 [mrad]
|
0,000
|
-0,011
|
0,011
|
0,130
|
1
|
|
a4 [mrad]
|
0,000
|
-0,009
|
0,009
|
0,130
|
1
|
|
stereo [mrad]
|
-20,000
|
-20,020
|
0,020
|
0,130
|
1
|
Final Metrology:
Excel sheet for xy-measurement
Excel sheet for z-measurement
Module# 20220380200004
Baseboard # 20220480100010
Sensor location and leakage current before assembly at 150V, 350V,500V and temperature:
|
Position
|
Sensor ID
|
I@150V
|
I@350V
|
I@500V
|
Temperature
|
|
1
|
STN11031-02041
|
0,22
|
0,35
|
0,4
|
26,5
|
|
2
|
...43
|
0,21
|
0,3
|
0,35
|
26,1
|
|
3
|
...40
|
0,24
|
0,34
|
0,4
|
26,2
|
|
4
|
...39
|
0,19
|
0,3
|
0,3
|
13,9(23,9?)
|
|
Sum of currents/ mean temperature
|
|
0,86
|
1,29
|
1,45
|
26,27
|
Initial Metrology:
|
Parameter
|
Design
|
Measure
|
Deviation
|
Tolerance
|
PASS
|
|
mhx [um]
|
-6500,000
|
-6469,000
|
-31,000
|
30,000
|
0
|
|
mhy [um]
|
-37000,000
|
-37033,700
|
33,700
|
30,000
|
0
|
|
msx [um]
|
38500,000
|
38523,600
|
-23,600
|
100,000
|
1
|
|
msy [um]
|
-37000,000
|
-37010,000
|
10,000
|
30,000
|
1
|
|
midxf [um]
|
0,000
|
6,900
|
-6,900
|
10,000
|
1
|
|
midyf [um]
|
0,000
|
1,100
|
-1,100
|
5,000
|
1
|
|
sepf [um]
|
64090,000
|
64088,500
|
1,500
|
10,000
|
1
|
|
sepb [um]
|
64090,000
|
64089,400
|
0,600
|
10,000
|
1
|
|
a1 [mrad]
|
0,000
|
0,012
|
-0,012
|
0,130
|
1
|
|
a2 [mrad]
|
0,000
|
0,021
|
-0,021
|
0,130
|
1
|
|
a3 [mrad]
|
0,000
|
0,051
|
-0,051
|
0,130
|
1
|
|
a4 [mrad]
|
0,000
|
0,070
|
-0,070
|
0,130
|
1
|
|
stereo [mrad]
|
-20,000
|
-20,023
|
0,023
|
0,130
|
1
|
Final Metrology:
Excel sheet for xy-measurement
Excel sheet for z-measurement
|
| |
|
| |
|
|
